Introduction to Microlithography

Bowden, Murrae J., Willson, C. Grant, Thompson, Larry F.

Updated and expanded! Reviews the theory, materials, and processes that are used in the lithographic process. Opens with a brief historical introduction to the advances in microlithography. Discusses four major topics: the physics of the lithographic process, organic resist materials, resist processing, and plasma etching. Designed as a tutorial for researchers with no experience in the field, as well as those experienced in microlithography. Will also prove invaluable to those already involved in microlithography. Includes numerous references for more detailed reading on specific aspects of microlithography.

EAN

9780841228481

Publisher

American Chemical Society

Published

1 January 1994

Pages

540